APEX™ Photo-Structurable Glass Wafers
APEX™ Glass is a photo-structurable material that is available in 100mm and 150mm diameter wafers from 0.5mm to over 4mm thick. APEX™ Glass is processed using an exposure tool that can offer energy in the 310nm wavelength, a high temperature annealing oven and an HF wet etch station. Check out our APEX™ Glass Resource Center for technical information regarding this unique material.
Applications
- Bioarrays
- Microfluidics
- Molds for hot embossing and PDMS microstructures
- Multi-layered components
- Microelectromechanical Systems (MEMS) / BioMEMS
- Microfilters
- In-Vivo, In-Vitro
- Semiconductor / Electronics Packaging
- Photon Tunnels / Imbedded Optics
- Carrie (sacrificial) Wafers