Life Microfab

Life MicroFab

Process Equipment

Other Materials

Life MicroFab (LMF) also provides partial and complete micro-fabrication services of devices in materials other than just  APEX™ Glass. LMF can provide fabrication and process services for materials like Silicon, Pyrex™, SOI, Kapton™ and an array of others. Customers looking for a one stop shop for either a single process step up to a completed multi-layer device for product development, prototyping, low and high volume production now have a cost and time affective solution from Life MicroFab.

Our capabilities include critical dimensions from 1 micron to 1 mm, full CMOS process capabilities and complete metrology services. Our staff has a combined 50 years of experience in the fabrication of integrated circuits, MEMs, MOEMS, Bio-MEMS, photo-voltaic, microfluidic, microarray, bio-chips and other micro-scale devices.

Our engineers can work closely with your product R&D group to develop processes and completed prototypes from single layer to a full device process and manufacturing specifications. Our capabilities include photolithography, thin film deposition, etching and metrology services.

All micro-fabrication processing is done in a state-of the-art class 100 clean room with facilities support that includes 18 meg ohm DI water, humidity and temperature controlled climate, central vacuum system, inert and process gas delivery, particle counters, gowning areas, pass through and service chases.

Equipment and Capabilities (Substrates up to 150mm)

  • OAI and Karl Suss Contact and Mask Aligners up to 150mm
  • Photoresist Spinners, HMDS bake, Develop Station
  • Plasma Asher and Descum
  • Ultrasonic Baths
  • Wet Stations for RCA, SC1, SC2 Clean, HF Etch, Piranha, Nitride, Oxide, etc.
  • Caustic Bench KOH Bath, Super Critical Point CO2 Dryer
  • 5 Target Sputter, Metal e?Beam and Metal Evaporator, Electroplater
  • RIE, DRIE, BOSCH, Plasma Etch
  • Wet and Dry Ox, N?Dope, P?Dope and Drive, Atmos Ox
  • Low Temp CVD, LPCVD PolySilicon and Silicon Nitride
  • Forming Gas Diffusion
  • Parylene Coater
  • RTP, ICP Plasma Etch, Plasma CVD, Die Electric Evaporator
  • Cu and Ni Plating Capabilities
  • Solvent Bench, Spin Rinser Dryers, Bell Jar Evaporator, Anneal Ovens
  • Class 100 Clean Room, 18 Meg Ohm DI Water System, Gas Pad, Particle Counter
  • SEM, Ellipsometer, Surface Profiler, Non? Contact Surface Profiler, Microscope, Optical Thin Film Measurement, Probe, AFM, 4 Point Probe

Contact Life MicroFab today to see how we can help bring your designs to reality.