Life MicroFab
TGV: 3D Packaging
APEX™ Glass is a patent-pending photo-structurable glass-ceramic material that is perfect for the fabrication of thru glass vias (TGVs) for a variety of 3D packaging and interconnect applicatons. TGVs can easily be fabricated utilizing a simple UV exposure with a mask, an anneal and a high volume batch wet etch that produces anisotropic or straight sidewall via's. TGVs from 8 microns and up can be fabricated with pitches as small as a few microns. This enables customers to design high density via packing with aspect ratios in excess of 10:1. Different diameter via's can also be fabricated on the same device.
Life Bioscience Inc (LBSI) offers the APEX™ Glass TGV solutions for customers by either supplying the material for end user processing or by providing full fabrication services from our Life MicroFab (LMF) division. In addition, LMF offers a full range of CMOS processes including thin film, dry etch, CVD and metrology.
APEX™ Glass ceramic is a “Green Packaging Material"
The IC and packaging industry have been moving towards “green” packaging materials to meet the Reduction of Hazardous Substances directive (RoHS, European Union Directive). One of the biggest concerns has centered around halogen containing substrates, and in particular FR4. FR4 is made with halogen elements and when it catches on fire can produce toxic gasses. APEX™ Glass ceramic is produced with zero halogen containing ingredients. Additionally, because the material is a glass ceramic, it does not need to meet UL94 requirements (which pertains only to plastic materials).
Contact Life MicroFab today to see how we can help bring your designs to reality.